Generalized multi-frequency selection for full-field interferometric shape measurement

被引:2
|
作者
Towers, CE [1 ]
Towers, DP [1 ]
Jones, JDC [1 ]
机构
[1] Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland
关键词
absolute phase measurement; multi-frequency interferometry; profilometry;
D O I
10.1117/12.566651
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We present two novel multi-frequency techniques for absolute range measurement in interferometry. A comparison of these techniques with the method of excess fractions has been performed by computer simulation and experimental data is presented.
引用
收藏
页码:406 / 409
页数:4
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