Fabrication of lead zirconate titanate thin films by inkjet printing

被引：0
|
作者：
Shimofuku, Akira [1 ]
Machida, Osamu [1 ]
Takeuchi, Atsushi [1 ]
Akiyama, Yoshikazu [1 ]
Ohta, Eiichi [1 ]
机构：
[1] RICOH Co Ltd, Atsugi, Kanagawa 2430298, Japan
来源：
ELECTROCERAMICS IN JAPAN XVI | 2014年 / 582卷
关键词：
lead zirconate titanate (PZT); direct patterning; inkjet printing (IJP); surface energy controlling; self assembled monolayer (SAM); coffee stain; DEPOSITION;
D O I：
10.4028/www.scientific.net/KEM.582.7
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this study, a finely patterned lead zirconate titanate (PZT) film is fabricated by a combination of inkjet printing (LT), chemical solution deposition (CSD), and surface energy controlling technology. The PZT film, which can be used as an actuator, has enough thickness after iterating the set of surface treatment, inkjet deposition, and baking. We confirmed the electrical characteristic of this film and drop ejection from inkjet head using it.
引用
收藏
页码：7 / 10
页数：4
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