Generation of microplasma using multiwall carbon nanotubes cathode

被引:5
|
作者
Zou, Q. [1 ]
Li, Y. G. [1 ]
Wang, M. Z. [1 ]
Zhao, Y. C. [1 ]
Zou, L. H. [1 ]
机构
[1] Yanshan Univ, State Key Lab Metastable Mat Sci & Technol, Qinhuangdao 066004, Hebei, Peoples R China
来源
PLASMA DEVICES AND OPERATIONS | 2009年 / 17卷 / 03期
关键词
microplasma; gas discharge; breakdown voltage; carbon nanotube; field emission; FIELD-EMISSION PROPERTIES; RF MICROPLASMA; DEVICES; ARRAYS;
D O I
10.1080/10519990902957930
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
Microplasma was produced in argon gas in a scanning electron microscope at near-atmospheric pressure using a multi-wall carbon nanotube (CNT) film as a cathode. It is demonstrated that with the CNT film used as a cathode, the breakdown voltage was much lower than the breakdown voltage when the conventional cathode made of flat metal film was used and the discharge was highly reproducible. These features of the gas discharge are defined by the field emission from the CNT cathode.
引用
收藏
页码:181 / 190
页数:10
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