Optical and electrical characterisation of plasma processed N-GaAs

被引：0
|
作者：
Murtagh, M [1 ]
Herbert, PAF [1 ]
Kelly, PV [1 ]
Crean, GM [1 ]
机构：
[1] NATL UNIV IRELAND UNIV COLL CORK,NATL MICROELECTR RES CTR,CORK,IRELAND
来源：
DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II | 1996年 / 406卷
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D O I：
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：327 / 332
页数：6
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