Bootstrapped Ring Oscillator with Propagation Delay Time below 1.0 nsec/stage by Standard 0.5μm Bottom-Gate Amorphous Ga2O3-In2O3-ZnO TFT Technology

被引:0
|
作者
Yin, Huaxiang [1 ]
Kim, Sunil [1 ]
Kim, Chang Jung [1 ]
Park, Jae Chul [1 ]
Song, Ihun [1 ]
Kim, Sang-Wook [1 ]
Lee, Sung-Hoon [1 ]
Park, Youngsoo [1 ]
机构
[1] Samsung Adv Inst Technol, Semicond Lab, Yongin 449712, Kyunggi Do, South Korea
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes the design and fabrication of the high performance ring oscillator with the standard 0.5 mu m bottom-gate amorphous Ga(2)O(3)-In(2)O(3)-ZnO TFT technology. A series of process and geometry parameters of devices are sophistically optimized to decrease the circuit signal's propagation delay and, in particular, a novel 3TFTs bootstrapped inverter structure using the load-transistor's overlap capacitance as the bootstrapped capacitor is applied. Finally, the propagation delay time of 0.94ns/stage for a supply voltage of 9V is achieved in the 5-stage ring oscillator, which is over 75times faster than previous report.
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页码:81 / 84
页数:4
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