Design and Analysis of Triple Liquid Lens Array for Wavefront Compensation

In this study, we designed a triple liquid lens array based on the electrowetting-on-dielectric effect to correct the wavefront errors caused by the piston, tilt, and defocus. A electrowetting-on-dielectric triple liquid lens array model is constructed herein according to the electrowetting-on-dielectric theory. The simulation of the surface shape of the liquid interface changes with the voltage. The wavefront compensation capability of the triple liquid lens array on the piston, defocus, and tilt errors are analyzed. The simulation results showed that the three-liquid lens array can realize the correction and the compensation of different types of wavefront errors. The peak-to-valley value is reduced from 1.838 lambda before the compensation to 0. 285 lambda after the compensation. The root mean square value is reduced from 0.424 lambda before compensation to 0. 053 lambda after the compensation. The Strehl ratio is 0.161 before the compensation to 0.917 after the compensation. The related research results show that the triple liquid lens array has broad application prospects in the field without mechanical wavefront correction.