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- [2] Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmas JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (03): : 689 - 697
- [9] PLASMA-WALL INTERACTIONS WITH A CARBON WALL BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (09): : 1178 - 1178