Structural and elemental X-ray microanalysis with synchrotron radiation in confocal geometry

被引:8
|
作者
Sosa, Carlos M. [1 ]
Jorge Sanchez, H. [1 ,3 ]
Perez, Carlos A. [2 ]
Perez, Roberto D. [1 ,3 ]
机构
[1] IFEG CONICET, Cordoba, Argentina
[2] LNLS, BR-13084971 Campinas, SP, Brazil
[3] Natl Univ Cordoba, FAMAF, RA-5000 Cordoba, Argentina
关键词
3D X-ray microanalysis; Polycapillary optics; EDXRF; EDXRD; FLUORESCENCE; DIFFRACTION; SPECTROSCOPY;
D O I
10.1016/j.nimb.2013.10.021
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A spectrometer for 3D structural and multielemental X-ray microanalysis with synchrotron radiation is presented in this work. It is based on the combination of the energy dispersive X-ray fluorescence and diffraction with polycapillary optics. The 3D spatial resolution was achieved by the superposition of the foci of two lenses arranged in confocal geometry. The parameters that affect the performance of the spectrometer were study in detail giving rise to a simplified calibration method for depth profile analysis. Two specific examples were included to illustrate the use of the spectrometer in order to identify their possible application fields. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:171 / 176
页数:6
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