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- [4] Characteristics of an electron cyclotron resonance plasma source He Jishu/Nuclear Techniques, 2000, 23 (10): : 707 - 712
- [5] CHARACTERISTICS OF ELECTRON-CYCLOTRON RESONANCE PLASMA SOURCES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 894 - 898
- [7] Electron cyclotron resonance plasma produced with a closed spheroidal electron cyclotron resonance surface in a simple cusp field JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (8A): : L885 - L887
- [8] CHARACTERISTICS OF A MICROWAVE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (05): : 3219 - 3227
- [9] SILICIDATION USING ELECTRON-CYCLOTRON RESONANCE PLASMA JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (03): : 1087 - 1090