Micromachined High-Frequency Ultrasound 2-Dimensional Array Transducer

被引：0

作者：

Liu, C. G. ^{[1
]}

Zheng, F. ^{[2
]}

Chen, R. M. ^{[2
]}

Ma, T. ^{[2
]}

Djuth, F. T. ^{[1
]}

Zhou, Q. F. ^{[2
]}

Shung, K. K. ^{[2
]}

机构：

[1] Geospace Res Inc, El Segundo, CA 90245 USA

[2] Univ Southern Calif, Dept Biomed Engn, Los Angeles, CA USA

来源：

2013 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2013年

关键词：

D O I：

10.1109/ULTSYM.2013.0203

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Micromachining techniques have been developed and applied in fabricating high frequency piezoelectric composite 2-dimensional ultrasound array transducers. The array has 256 elements with the size of 105 mu m by 105 mu m. The kerf between elements is 5 mu m. The center frequency is 52 MHz with the -6 dB bandwidth of 58%. As many as 98% elements are working. The pulse-echo responses have been measured with the testing system.

引用

页码：781 / 784

页数：4

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