A Sub-400-nT/√Hz, 775-μW, Multi-Loop MEMS Magnetometer With Integrated Readout Electronics

被引：20

作者：

Minotti, Paolo ^{[1
]}

Brenna, Stefano ^{[1
]}

Laghi, Giacomo ^{[1
]}

Bonfanti, Andrea G. ^{[1
]}

Langfelder, Giacomo ^{[1
]}

Lacaita, Andrea L. ^{[1
]}

机构：

[1] Politecn Milan, Dipartimento Elettron Informaz & Bioingn, I-20133 Milan, Italy

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2015年 / 24卷 / 06期

关键词：

Microelectromechanical systems (MEMS) sensors; magnetometers; capacitive sensing interface; navigation; LORENTZ FORCE MAGNETOMETER; MAGNETIC-FIELD SENSOR; OPERATION;

D O I：

10.1109/JMEMS.2015.2452316

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for off-resonance operation. The integrated readout is based on a differential charge amplifier front-end, and designed to be balanced with the sensor in terms of noise and power consumption. The overall system, including demodulation and filtering stages, shows a programmable full-scale up to +/- 2.4 mT, limited by the electronics saturation. The bandwidth can be programmed up to 150 Hz for off-resonance operation where a sub-400-nT/root Hz resolution at 775-mu W power consumption is obtained, including the integrated readout and the Lorentz current. Perspectives on low-consumption driving oscillators for off-resonance mode are finally given. [2015-0139]

引用

页码：1938 / 1950

页数：13