Electroluminescence from Alq3-Containing Electron-Beam Resists for Light-Emitting Organic Nanometer-Scale Devices

A simple method was developed for fabricating current-drivable light-emitting organic structures with lateral sizes on the nanometer scale. Appropriate synthesis conditions for organic electron-beam (EB) resist copolymers of ZEPS20A containing 8-hydroxyquinoline aluminum (Alq(3)) were determined for the structures. Square layer structures with side lengths of less than 1 mu m were fabricated using this composite resist simply by EB exposure and development. Green electroluminescence attributed to the emission from Alg a was observed from the devices with the composite resist. This method opens the door to the development of organic quantum-information devices, near-field optical microscopy, nanoscale photopatterning, high-resolution light-emitting diodes, and highly sensitive biosensors.