Cryogenic substrate cooling or substrate heating without vacuum feedthroughs

被引：0
|
作者：
Smith, WF [1 ]
Stokes, BG [1 ]
Crawford, JF [1 ]
机构：
[1] Haverford Coll, Dept Phys, Haverford, PA 19041 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2000年 / 18卷 / 01期
关键词：
D O I：
10.1116/1.582113
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：290 / 292
页数：3
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