Wireless uncooled infrared detectors based on thin-film piezoelectric MEMS resonators

This paper demonstrates a wireless uncooled infrared (IR) detector based on a Lamb wave resonator with low detection limit. Wireless transmission is achieved by near-field electromagnetic coupling. The wireless IR detector shows a monotonic decrease in impedance magnitude and resonant frequency with the change of the power density of the IR irradiation from 0.01 mW/mm(2) to 0.7 mW/mm(2). The average responsivities of impedance magnitude and resonant frequency are 0.61x10(-3) dB/nW and 5.01 Hz/nW respectively. With further development, the proposed wireless IR detector is promising for wearable or implantable applications.