Effects of redox treatment on diamondlike carbon coated Mo substrates

被引：0
|
作者：
Lin, CM [1 ]
Chang, SJ
Yokoyama, M
Lin, IN
机构：
[1] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 701, Taiwan
[2] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2000年 / 39卷 / 2A期
关键词：
redox treatment; diamondlike carbon; atomic force microscopy; field enhancement factor;
D O I：
10.1143/JJAP.39.L76
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have studied the effects of oxidation-reduction (redox) treatment applied to Mo substrates on the characteristics of the subsequently deposited diamondlike cal bon (DLC) films. Atomic force microscopic (AFM) analyses revealed that the surface of Mo substrates became rougher after the redox treatment. The subsequently deposited DLC films inherited the surface morphology of the Mo substrates. The electron emission characteristics of DLC films coated on redox Mo substrates are superior to those of DLC films coated on normal Mo films which is ascribed to the increase in the field enhancement factor of the DLC films.
引用
收藏
页码：L76 / L78
页数：3
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