Quadrature demodulation based on lock-in amplifier technique for self-mixing interferometry displacement sensor

被引:15
|
作者
Zhang, Zihua [1 ]
Li, Chengwei [1 ]
Huang, Zhen [2 ]
机构
[1] Harbin Inst Technol, Sch Instrumentat Sci & Engn, Harbin 150001, Heilongjiang, Peoples R China
[2] Lingnan Normal Univ, Sch Phys Sci & Technol, Zhanjiang 524048, Peoples R China
基金
中国国家自然科学基金;
关键词
LASER FEEDBACK INTERFEROMETRY; SEMICONDUCTOR-LASER; MODULATION;
D O I
10.1364/AO.58.006098
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A new self-mixing interferometry quadrature demodulation method based on a lock-in amplifier technique is proposed. Sinusoidal phase modulation of the beam is obtained by an electro-optic modulator (EOM) in the external cavity. Then the real phase of the external target can be calculated by lock-in amplifier analysis method. In this paper, the validity of the proposed method is confirmed by theoretical analysis and means of simulated signals, and then it is demonstrated by several experimental measurements for target harmonic and arbitrary motion. The results show that the proposed method can get a high-precision measurement, even using a diffusive target. (C) 2019 Optical Society of America
引用
收藏
页码:6098 / 6104
页数:7
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