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Optical frequency comb profilometry with a compressive sensing-based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements
被引:6
|作者:
Quang Duc Pham
[1
]
Hayasaki, Yoshio
[1
]
机构:
[1] Utsunomiya Univ, Ctr Opt Res & Educ, Utsunomiya, Tochigi 3218585, Japan
来源:
关键词:
large-volume metrology;
digital micromirror device;
optoelectronic interferometry;
frequency-stabilized femtosecond laser;
FEMTOSECOND LASER-PULSES;
HOLOGRAPHY;
INTERFEROMETER;
METROLOGY;
D O I:
10.1117/1.JMM.14.4.041305
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
We demonstrated optical-frequency-comb profilometry with a compressive sensing-based single-pixel camera composed of digital micromirror devices and a photodetector for measurement of large-depth objects. Use of two harmonic frequencies allowed us to measure an object with a meter-order depth without any 2 pi-phase ambiguity. Profilometry with 10 x 10 pixels using the 12th and 13th harmonics of the fundamental frequency of 76 MHz gave a noise level of similar to 10 mu m in terms of standard deviation. Linking the measurement results obtained using one and two frequencies gave an axial dynamic range of similar to 3.9 x 10(5). (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
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