Optical frequency comb profilometry with a compressive sensing-based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements

被引:6
|
作者
Quang Duc Pham [1 ]
Hayasaki, Yoshio [1 ]
机构
[1] Utsunomiya Univ, Ctr Opt Res & Educ, Utsunomiya, Tochigi 3218585, Japan
来源
关键词
large-volume metrology; digital micromirror device; optoelectronic interferometry; frequency-stabilized femtosecond laser; FEMTOSECOND LASER-PULSES; HOLOGRAPHY; INTERFEROMETER; METROLOGY;
D O I
10.1117/1.JMM.14.4.041305
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrated optical-frequency-comb profilometry with a compressive sensing-based single-pixel camera composed of digital micromirror devices and a photodetector for measurement of large-depth objects. Use of two harmonic frequencies allowed us to measure an object with a meter-order depth without any 2 pi-phase ambiguity. Profilometry with 10 x 10 pixels using the 12th and 13th harmonics of the fundamental frequency of 76 MHz gave a noise level of similar to 10 mu m in terms of standard deviation. Linking the measurement results obtained using one and two frequencies gave an axial dynamic range of similar to 3.9 x 10(5). (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
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页数:5
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