Synthesis of CuIn0.7Ga0.3Se2 nanoparticles and its quarternary sputtering target

The chalcopyrite-type of CuIn0.7Ga0.3Se2 nanoparticle was successfully prepared by mechanical alloying method (MA). The phase of the obtained powder was analyzed by x-ray diffraction (XRD), and its microstructure was analyzed by scanning electron microscope (SEM) and transmission election microscope (TEM). Subsequently, the sintering process of CIGS quarternary target was investigated. The result suggests that only CuIn0.7Ga0.3Se2 phase exist in the powder with the rotation speed of 350 r/min and 2 hours mixing time by planetary ball milling. The particles were seriously agglomerated and the size of agglomerates was about 100 nm. Finally the as-made CIGS nanoparticles were used to fabricate CIGS target through both pressureless sintering and hot pressing methods. The hot pressing was fairly effective to increase the density of CIGS target. This fabricated target can be used for magnetron-sputtering deposition of CIGS absorbers.