Fabrication of Cr nanostructures with the scanning tunnelling microscope

被引：9
|
作者：
Xie, W
Dai, X
Xu, LS
Allee, DA
Spector, J
机构：
[1] LUCENT TECHNOL INC,ALLENTOWN,PA 18103
[2] CYPRESS SEMICOND CORP,SAN JOSE,CA 95134
[3] ARIZONA STATE UNIV,DEPT ELECT ENGN,TEMPE,AZ 85287
[4] ROSS TECHNOL INC,AUSTIN,TX 78735
来源：
NANOTECHNOLOGY | 1997年 / 8卷 / 02期
关键词：
D O I：
10.1088/0957-4484/8/2/007
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this work, nanometer scale electrically conducting lines and quantum structures on chromium (Cr) films have been fabricated with an ambient scanning tunnelling microscope and a subsequent CR-14 chromium etch. The line width of these structures is approximately 60 nm and the height of the lines is approximately 10 nm. In addition, experiments have been performed to determine the Cr etch rate in CR-14 etchant and the thickness of the Cr layer that could be oxidized through by the STM tunnelling current.
引用
收藏
页码：88 / 93
页数：6
相关论文
共 50 条
  • [1] Superconducting nanostructures fabricated with the scanning tunnelling microscope
    Rodrigo, JG
    Suderow, H
    Vieira, S
    Bascones, E
    Guinea, F
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2004, 16 (34) : R1151 - R1182
  • [2] Bipolar device fabrication using a scanning tunnelling microscope
    Skeren, Tomas
    Koester, Sigrun A.
    Douhard, Bastien
    Fleischmann, Claudia
    Fuhrer, Andreas
    NATURE ELECTRONICS, 2020, 3 (09) : 524 - 530
  • [3] Bipolar device fabrication using a scanning tunnelling microscope
    Tomáš Škereň
    Sigrun A. Köster
    Bastien Douhard
    Claudia Fleischmann
    Andreas Fuhrer
    Nature Electronics, 2020, 3 : 524 - 530
  • [4] FABRICATION OF SILICON NANOSTRUCTURES WITH A SCANNING TUNNELING MICROSCOPE
    SNOW, ES
    CAMPBELL, PM
    MCMARR, PJ
    APPLIED PHYSICS LETTERS, 1993, 63 (06) : 749 - 751
  • [5] FABRICATION OF GAAS NANOSTRUCTURES WITH A SCANNING TUNNELING MICROSCOPE
    SNOW, ES
    CAMPBELL, PM
    SHANABROOK, BV
    APPLIED PHYSICS LETTERS, 1993, 63 (25) : 3488 - 3490
  • [6] SCANNING TUNNELING MICROSCOPE LASER FABRICATION OF NANOSTRUCTURES
    YAU, ST
    SALTZ, D
    NAYFEH, MH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 1371 - 1375
  • [7] Fabrication of Pd nanostructures with scanning tunneling microscope
    Fukuzawa, Hideaki
    Kimijima, Hideki
    Yoshikawa, Nobuyuki
    Sugahara, Masanori
    Japanese Journal of Applied Physics, Part 2: Letters, 1995, 34 (9 B):
  • [8] FABRICATION OF PD NANOSTRUCTURES WITH SCANNING TUNNELING MICROSCOPE
    FUKUZAWA, H
    KIMIJIMA, H
    YOSHIKAWA, N
    SUGAHARA, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1995, 34 (9B): : L1221 - L1223
  • [9] A SCANNING TUNNELING MICROSCOPE SCANNING ELECTRON-MICROSCOPE SYSTEM FOR THE FABRICATION OF NANOSTRUCTURES
    EHRICHS, EE
    SMITH, WF
    DELOZANNE, AL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 1380 - 1383
  • [10] Fabrication of surface nanostructures using scanning electron microscope
    Department of Physics, Yunnan University, Kunming 650091, China
    不详
    Pan Tao Ti Hsueh Pao, 2006, SUPPL. (186-188):
12345