Integrated pressure and flow sensor in silicon-based ultrasonic surgical actuator

被引：0
|
作者：
Chen, X [1 ]
Lal, A [1 ]
机构：
[1] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA
来源：
2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2001年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We report on a transducer that not only cuts tissue ultrasonically but also senses pressure and liquid flow rate during cutting. Horn-shaped silicon needles with integrated piezoresistive pressure sensors were fabricated using bulk micromachining technology. The needles were driven ultrasonically by bonded PZT-4 plates. The device can be driven at its lambda/2 longitudinal resonance to cut and sense pressure, while cut tissue is aspirated through the needle by an external pump.
引用
收藏
页码：1373 / 1376
页数：4
相关论文
共 50 条
  • [1] Silicon-based ultrasonic surgical actuators
    Lal, A
    PROCEEDINGS OF THE 20TH ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY, VOL 20, PTS 1-6: BIOMEDICAL ENGINEERING TOWARDS THE YEAR 2000 AND BEYOND, 1998, 20 : 2785 - 2790
  • [2] Integrated silicon-based nanoplasmonic sensor
    Guyot, L.
    Blanchard-Dionne, A-P
    Patskovsky, S.
    Meunier, M.
    OPTICS EXPRESS, 2011, 19 (10): : 9962 - 9967
  • [3] Relationship between sensitivity and waveguide position on diaphragm for silicon-based integrated optic pressure sensor
    Yamada, A
    Shirai, Y
    Goto, T
    Ohkawa, M
    Sekine, S
    Sato, T
    CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST, 2001, : 420 - 421
  • [4] Investigation of the hysteresis phenomenon of a silicon-based piezoresistive pressure sensor
    Chiang, Hsin-Nan
    Chou, Tsung-Lin
    Lin, Chun-Te
    Chiang, Kuo-Ning
    2007 INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE, PROCEEDINGS OF TECHNICAL PAPERS, 2007, : 165 - 168
  • [5] High-precision silicon-based integrated optical temperature sensor
    Wang Yi-meng
    Shu Hao-wen
    Han Xiu-you
    CHINESE OPTICS, 2021, 14 (06): : 1355 - 1361
  • [6] SILICON-BASED ULTRASONIC MICROSENSORS AND MICROPUMPS
    WHITE, RM
    INTEGRATED FERROELECTRICS, 1995, 7 (1-4) : 353 - 358
  • [7] A Novel Silicon-Based LED Packaging Module With an Integrated Temperature Sensor
    Chang, Shengwei
    Tsou, Chingfu
    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2014, 4 (05): : 769 - 776
  • [8] Silicon-based double fano resonances photonic integrated gas sensor
    Salama, Norhan A.
    Alexeree, Shaimaa M.
    Obayya, Salah S. A.
    Swillam, Mohamed A.
    SCIENTIFIC REPORTS, 2024, 14 (01):
  • [9] Silicon-based Integrated Field Emission Electron Sources for Sensor Application
    Schreiner, R.
    Dams, F.
    Prommesberger, C.
    Bornmann, B.
    Serbun, P.
    Navitski, A.
    Mueller, G.
    2011 24TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2011, : 19 - +
  • [10] SILICON-BASED INTEGRATED-OPTICS TECHNOLOGY FOR OPTICAL SENSOR APPLICATIONS
    VALETTE, S
    RENARD, S
    JADOT, JP
    GIDON, P
    ERBEIA, C
    SENSORS AND ACTUATORS A-PHYSICAL, 1990, 23 (1-3) : 1087 - 1091
12345