μ-XRFA and μ-EXAFS measurements of organic and non-organic samples (status report)

The capabilities of the KMC-2 beamline at BESSY for spatially resolved x-ray measurements with micro- and nanometer resolution are reviewed. An application of micro- X-ray fluorescence analysis (mu XRFA), micro-extended X-ray absorption fine structure (mu EXAFS), micro-X-ray absorption near-edge structure (mu XANES) as well as standing wave technique (SWT) as a powerful method for the organic and non-organic samples characterization with synchrotron radiation is discussed. Mono and poly-capillary optical systems were used for characterization of organic and non-organic samples, by means of mu XRFA mapping and mu EXAFS and mu XANES. The results of depth resolved tungsten XAFS measurements in a Si/W/Si trilayer embedded in a Au waveguide structure are presented. A depth resolution on the order of 1 nm has been achieved.