A design tool for inductive position and speed sensors via a fast integral equation based method

被引：0
|
作者：
Kamon, M [1 ]
Nguyen, AM [1 ]
Gilbert, JR [1 ]
机构：
[1] Microcosm Technol Inc, Cambridge, MA 02142 USA
来源：
1999 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS | 1999年
关键词：
magnetic sensor; integral equation; simulation; eddy currents;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes using 3D integral equation based simulation in combination with simulation managment to provide a design tool for an eddy-current inductive position and speed sensor under development at CSEM Microsystems. Both the frequency dependence and the position dependence of the inductance is explored to understand the operation and sensitivity of the sensor. The frequency dependence of the inductance can be captured in a low order model which can be used for higher level system simulation.
引用
收藏
页码：313 / 317
页数：5
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