Advanced Delayer Methods for TEM Sample Preparations

被引：0
|
作者：
Fan, Chunyan [1 ]
Duan, Shuqing [1 ]
Li, Ming [1 ]
Han, May [1 ]
Chen, Liu [1 ]
Zhang, Mark [1 ]
Chien, Wei-Ting Kary [1 ]
机构：
[1] Semicond Mfg Int Corp, Pudong New Area, 18 Zhangjiang Rd, Shanghai 201203, Peoples R China
来源：
2017 IEEE 24TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA) | 2017年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports three new delayer methods for TEM sample preparation with the benefit to locate the region of interest rapidly and efficiently. The experimental results showed that these methods can help to minimize the cycle time, decrease the cost and improve the sample quality.
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页数：3
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