Image Processing-Based Technology for Dirt Detection of Quartz Wafer

被引：0

作者：

Yang Wanhua ^{[1
]}

Wang Yanlin ^{[1
]}

Li Dong ^{[1
]}

机构：

[1] Beijing Informat Sci & Technol Univ, Beijing, Peoples R China

来源：

PROCEEDINGS OF 2013 IEEE 11TH INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS (ICEMI) | 2013年

关键词：

quartz wafer; image processing; dirt detection; OpenCV;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Quartz wafer inevitably produces various physical defects in the production process. This paper focuses on the quartz wafer dirt defects, and proposes a way for image processing on the quartz wafer by using of computer vision library OpenCV. The proposed method is to find contours of the processed images to judge whether there is dirt or not. Experiments show that this method can well detect the dirt of quartz wafer.

引用

页码：176 / 178

页数：3

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