Stabilized Perpendicular Magnetic Anisotropy L11 CoPtCu Thin Film at Room Temperature

被引:1
|
作者
Sun, An-Cheng [1 ]
Huang, Chuan-Fa [1 ]
Li, L. J. [1 ]
Chen, Sheng-Fu [1 ]
Chen, Yu-Shen [1 ]
机构
[1] Yuan Ze Univ, Dept Chem Engn & Mat Sci, Chungli 32003, Taiwan
关键词
c-axis orientation; microelectromechanical systems; tetragonal Pr2Fe14B phase; thickness dependence; thin films; UNDERLAYER; ALLOY;
D O I
10.1109/TMAG.2013.2297512
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, 4 nm-thick Co27Pt50Cu23 magnetic thin films were deposited on a (111)-textured Pt underlayer on a glass substrate at different substrate temperatures (T-s). Hard magnetic behaviors with outstanding perpendicular magnetic anisotropy (PMA) were obtained as T-s = RT-400 degrees C. The result indicates the formation of superstructure L1(1) CoPtCu(111) phase with easy axis aligning perpendicularly to the plane. Above 400 degrees C, the CoPtCu film showed soft magnetic properties. Ordered L1(1) CoCuPt phase with PMA and high Ku value of about 5.7 x 10(5) J/m(3) is obtained at T-s = RT. The result suggests that RT-deposited L1(1) CoPtCu thin film could be a potential candidate for magnetic sensor and spintronic device applications.
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页数:4
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