High-speed tapping mode imaging with active Q control for atomic force microscopy

The speed of tapping mode imaging with the atomic force microscope (AFM) has been increased by over an order of magnitude. The enhanced operation is achieved by (1) increasing the instrument's mechanical bandwidth and (2) actively controlling the cantilever's dynamics. The instrument's mechanical bandwidth is increased by an order of magnitude by replacing the piezotube z-axis actuator with an integrated zinc oxide (ZnO) piezoelectric cantilever. The cantilever's dynamics are optimized for high-speed operation by actively damping the quality factor (Q) of the cantilever. Active damping allows the amplitude of the oscillating cantilever to respond to topography changes more quickly. With these two advancements, 80 mu mx80 mu m high-speed tapping mode images have been obtained with a scan frequency of 15 Hz. This corresponds to a tip velocity of 2.4 mm/s. (C) 2000 American Institute of Physics. [S0003- 6951(00)02811-4].