Video-rate fringe analyzer based on phase-shifting electronic moire patterns

被引:52
|
作者
Kato, J [1 ]
Yamaguchi, I [1 ]
Nakamura, T [1 ]
Kuwashima, S [1 ]
机构
[1] OHYOH KEISOKU KENKYUSHO OKK INC, OHTU KU, TOKYO 145, JAPAN
关键词
fringe analysis; interferometry; moire techniques;
D O I
10.1364/AO.36.008403
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We have developed a fringe analyzer that delivers the phase distribution at a video rate from a fringe pattern containing a spatial carrier. It is based on parallel generations of three phase-shifted moire patterns through electronic multiplication with computer-generated reference gratings and low-pass filtering. The phase distribution is derived by the subsequent parallel processing of these patterns on the basis of a three-step phase-shifting algorithm. By modification of the bias phase distribution of the reference gratings, several functions, such as correction of an initial wave-front error, are realized in real time. The usefulness of this analyzer is demonstrated experimentally for phase measurements by grating-projection surface topography and interferometry. (C) 1997 Optical Society of America.
引用
收藏
页码:8403 / 8412
页数:10
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