Preparation and thermopower of CaCuO2 thin film

被引：0

作者：

Thaowankaew, Somporn ^{[1
,2
]}

Chao-moo, Watchara ^{[1
,2
]}

Nontra-Udorn, Rungrut ^{[1
,2
]}

Vora-ud, Athorn ^{[1
,2
]}

Muthitamongkol, Pennapa ^{[3
]}

Thanachayanont, Chanchana ^{[3
]}

Seetawan, Tosawat ^{[1
,2
]}

机构：

[1] Sakon Nakhon Rajabhat Univ, Thin Films Res Lab, Ctr Excellence Alternat Energy, Res & Dev Inst, 680 Nittayo Rd, Mueang Dist 47000, Sakon Nakhon, Thailand

[2] Sakon Nakhon Rajabhat Univ, Program Phys, Fac Sci & Technol, 680 Nittayo Rd, Mueang Dist 47000, Sakon Nakhon, Thailand

[3] Natl Sci & Technol Dev Agcy, Natl Met & Mat Technol Ctr, 114 Thailand Sci Pk,Phahonyothin Rd,Klong 1, Klongluang 12120, Pathumthani, Thailand

来源：

MATERIALS TODAY-PROCEEDINGS | 2018年 / 5卷 / 06期

关键词：

DC magnetron sputtering; thin film thermoelectric; CaCuO2; X-ray diffractometer; Seebeck coefficient; THERMOELECTRIC PROPERTIES;

D O I：

10.1016/j.matpr.2018.02.085

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The CaCuO2 thin film was prepared by a dc magnetron sputtering system onto Al2O3 substrate. The CaCuO2 sputtering target was synthesized by solid state reaction (SSR) method from raw powders of CaCO3 and CuO to be loaded into vacuum chamber for thin film deposition. As-deposited thin film samples were annealed at 400, 500, 600, 700 and 800 degrees C for 1 hour in air. The effects of temperature annealing on phase identification, atomic composition, sheet resistance and Seebeck coefficient or thermopower of thin film samples have been investigated by X-ray diffractometer (XRD), energy dispersive X-ray spectroscopy (EDS), field-emission scanning electron microscopy (FE-SEM), four point probe method and steady state method, respectively. (C) 2017 Elsevier Ltd. All rights reserved. Selection and/or Peer-review under responsibility of SACT 2016.

引用

页码：14172 / 14176

页数：5

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