High temperature negative resist tunable for new lift off applications

被引：0
|
作者：
Toukhy, MA [1 ]
Lu, PH [1 ]
Kao, K [1 ]
Plass, R [1 ]
Chen, CH [1 ]
Faerber, GL [1 ]
机构：
[1] Clariant Corp, Somerville, NJ 08876 USA
来源：
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XXI, PTS 1 AND 2 | 2004年 / 5376卷
关键词：
D O I：
10.1117/12.537561
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new negative resist performance was demonstrated for elevated temperature, thick metal sputter process and lift-off application. This resist, AZ(R) EXP nLOF(R) 7000, can endure temperatures in excess of 220degreesC without pattern profile slope change. The applied resist thickness is similar to3mum and is processed to produce sufficient side wall slope adequate for up to 2mum sputter deposited metal thickness and lift-off process.
引用
收藏
页码：924 / 928
页数：5
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