Nanocrystalline Nb coating deposited on etched sapphire substrate by plasma alloying technique

被引：1

作者：

Dong, Yaqian ^{[1
]}

Zhang, Yaohui ^{[2
]}

Li, Taotao ^{[3
]}

Yang, Zhao ^{[1
]}

Lin, Hongchun ^{[1
]}

Sun, Dingbang ^{[1
]}

Wang, Ruiying ^{[1
]}

Tang, Bin ^{[1
]}

机构：

[1] Taiyuan Univ Technol, Inst New Carbon Mat, Taiyuan 030024, Peoples R China

[2] North Univ China, Sch Energy & Power Engn, Taiyuan 030051, Peoples R China

[3] North Univ China, Sch Mech Engn, Taiyuan 030051, Peoples R China

来源：

VACUUM | 2020年 / 181卷

基金：

山西省青年科学基金; 中国国家自然科学基金;

关键词：

Nanocrystalline; Niobium coating; Sapphire; Plasma alloying technique; Etching; Texture; NIOBIUM THIN-FILMS; SURFACE ENERGIES; GROWTH; MICROSTRUCTURE; SCATTERING; HYDROGEN; MO; TI;

D O I：

10.1016/j.vacuum.2020.109758

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The study of Nb-Al2O3 system can offer promising opportunities for engineering application of sapphire, with the unique connection between Nb and Al2O3. The nanocrystalline Nb coating on sapphire was prepared by plasma alloying technique on sapphire single crystalline substrate surfaces of (0001) substrate orientation using hydrogen-ion etching pre-treatment. The as-deposited nanocrystalline Nb coatings exits (110) texture, and companies with (220) oriented grains. TEM images shows that Nb coating has a thickness of 600-700 nm, exhibiting elongated "column-like" grains structure. This phenomenon can be attributed to the self-made double glow metal infiltration vacuum furnace. This technology complements the existing process system for the preparation of Nb coating, and then has potential application.

引用

页数：6

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