Coherence function control of a multi-mode laser diode by the frequency modulation and its low coherence interferometric application

被引:4
|
作者
Lee, Ho-Jae [1 ]
Joo, Ki-Nam [2 ]
机构
[1] Korea Inst Ind Technol, Photon Ind Technol Serv Ctr, Honam Technol Div, Kwangju, South Korea
[2] Chosun Univ, Dept Photon Engn, Kwangju 501759, South Korea
来源
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2014年 / 38卷 / 04期
关键词
Multi-mode laser diode; Low coherence scanning interferometry; Frequency modulation; Contrast improvement;
D O I
10.1016/j.precisioneng.2014.05.006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this investigation, a frequency-modulated multi-mode laser diode (LD) is introduced as a light source of low coherence scanning interferometry (LCSI) and its applicability is verified with experiments. The frequency modulation of a multi-mode LD can improve the contrast of the coherence peak corresponding to zero OPD and overcome the ambiguity to find the exact coherence peak appeared in frequency modulated single-mode LD or a multi-mode LD. As the experimental results, the coherence function of a multi-mode LD was changed with the frequency modulation and the expected coherence peak was obviously determined. As the result, the coherence length was 200 mu m. Also, the possibility to measure surface profile of a sample was experimentally confirmed with step height samples. Although the proposed technique cannot be guaranteed for high accuracy in the lack of the position accuracy of the scanning stage, it is suitable for the demand of spatially coherent measurements and high speed measurements adopting the sub-sampling technique because of its low cost, high available power and better spatial coherence than other white light sources. (C) 2014 Elsevier Inc. All rights reserved.
引用
收藏
页码:964 / 968
页数:5
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