Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

被引：4

作者：

Enami, Y ^{[1
]}

Jen, AKY ^{[1
]}

Meredith, G ^{[1
]}

Peyghambarian, N ^{[1
]}

机构：

[1] Kyoto Univ, Int Innovat Ctr, Sakyo Ku, Kyoto 6068501, Japan

来源：

ORGANIC PHOTONIC MATERIALS AND DEVICES VI | 2004年 / 5351卷

关键词：

electro-optic polymer; sol-gel waveguide; fiber-coupling loss; wet etching; hybrid modulators;

D O I：

10.1117/12.527613

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-mum-thick EO polymer overlayer, which reduces a half wave voltage (V-pi) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V-pi by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V-pi of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V-pi further.

引用

页码：28 / 35

页数：8

共 25 条

[1] Hybrid electro-optic polymer/sol-gel waveguide modulators fabriccated by all-wet etching process, using straight channel and Mach-Zelmder waveguides
Enami, Y
Jen, AKY
Meredith, G
Peyghambarian, N
[J]. OPTICAL COMPONENTS AND MATERIALS, 2004, 5350 : 89 - 96
[2] Hybrid electro-optic polymer/sol-gel waveguide modulator fabricated by all-wet etching process
Enami, Y
Meredith, G
Peyghambarian, N
Jen, AKY
[J]. APPLIED PHYSICS LETTERS, 2003, 83 (23) : 4692 - 4694
[3] Transversely tapered hybrid electro-optic polymer/sol-gel Mach-Zehnder waveguide modulators
Enami, Y.
Mathine, D.
DeRose, C. T.
Norwood, R. A.
Luo, J.
Jen, A. K. -Y.
Peyghambarian, N.
[J]. APPLIED PHYSICS LETTERS, 2008, 92 (19)
[4] Ultra-Broadband Mach-Zehnder Hybrid Electro-Optic Polymer/Sol-Gel Silica Waveguide Modulators
Enami, Yasufumi
Seki, Atsushi
Masuda, Shin
Luo, Jingdong
Jen, Alex K-Y.
[J]. 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2017,
[5] Hybrid polymer/sol-gel waveguide modulators with exceptionally large electro-optic coefficients
Enami, Y.
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Mathine, D.
Loychik, C.
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[J]. NATURE PHOTONICS, 2007, 1 (03) : 180 - 185
[6] Mach-Zehnder electro-optic modulator based on organic-silica sol-gel hybrid films
Department of Physics, KAIST, Taejon 305-701, Korea, Republic of
不详
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[7] Analysis and Demonstration of Ultra-Broadband Mach-Zehnder Hybrid Polymer/Sol-Gel Waveguide Modulators
Enami, Yasufumi
Seki, Atsushi
Masuda, Shin
Luo, Jingdong
Jen, Alex K. Y.
[J]. 2020 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC), 2020,
[8] Mach-Zehnder electro-optic modulator based on organic-silica sol-gel hybrid films
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[9] Improvement of electro-optic effect and novel waveguide structure in hybrid polymer/sol-gel modulators
Enami, Y.
DeRose, C. T.
Loychik, C. L.
Mathine, D. L.
Norwood, R. A.
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Jen, A. K-Y.
Peyghambarian, N.
[J]. ORGANIC PHOTONIC MATERIALS AND DEVICES IX, 2007, 6470
[10] Hybrid electro-optic polymer and selectively buried sol-gel waveguides
Enami, Y
Meredith, G
Peyghambarian, N
Kawazu, M
Jen, AKY
[J]. APPLIED PHYSICS LETTERS, 2003, 82 (04) : 490 - 492

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