13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources

被引：63

作者：

Hayden, P ^{[1
]}

Cummings, A ^{[1
]}

Murphy, N ^{[1
]}

O'Sullivan, G ^{[1
]}

Sheridan, P ^{[1
]}

White, J ^{[1
]}

Dunne, P ^{[1
]}

机构：

[1] Natl Univ Ireland Univ Coll Dublin, Sch Phys, Dublin 4, Ireland

来源：

JOURNAL OF APPLIED PHYSICS | 2006年 / 99卷 / 09期

基金：

爱尔兰科学基金会;

关键词：

D O I：

10.1063/1.2191477

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An examination of the influence of target composition and viewing angle on the extreme ultraviolet spectra of laser produced plasmas formed from tin and tin doped planar targets is reported. Spectra have been recorded in the 9-17 nm region from plasmas created by a 700 mJ, 15 ns full width at half maximum intensity, 1064 nm Nd:YAG laser pulse using an absolutely calibrated 0.25 m grazing incidence vacuum spectrograph. The influence of absorption by tin ions (Sn I-Sn X) in the plasma is clearly seen in the shape of the peak feature at 13.5 nm, while the density of tin ions in the target is also seen to influence the level of radiation in the 9-17 nm region. (C) 2006 American Institute of Physics.

引用

页数：4

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