Measurement Uncertainty Propagation in the Validation of High-Speed Interconnects

Validating the performance of high-speed interconnect modeling against measurements of fabricated test structures requires an understanding of the robustness of the measurement methods as well as the physical variations present in an imperfectly fabricated test structure. This paper presents a methodology for evaluating the performance of interconnect modeling considering the actual metrology variation and the real-world manufacturing tolerances used to fabricate the test vehicle. By ensuring that measurement results, inclusive of operator and equipment variations, overlap the modeling inclusive of expected manufacturing variations, confidence in the high-speed interconnect modeling is established.