Micro-mirror array for multi-object spectroscopy in cryogenic environment

被引：0
|
作者：
Waldis, Severin [2 ]
Zamkotsian, Frederic [1 ]
Lanzoni, Patrick [1 ]
Noell, Wilfiried [2 ]
Canonica, Michael [2 ]
de Rooij, Nico [2 ]
机构：
[1] Lab Astrophys Marseille, 38 Rue Frederic Joliot Curie, F-13388 Marseille, France
[2] Univ Neuchatel, IMT, CH-2007 Neuchatel, Switzerland
来源：
2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2008年
关键词：
Multi-Object Spectroscopy; programmable slit masks; micro-mirror array; cryogenic MOEMS;
D O I：
10.1109/OMEMS.2008.4607855
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Next-generation infra-red astronomical instrumentation for space and ground-based telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy (MOS) usable in a cryogenic environment. A 100x200 mu m(2) micro-mirror array was successfully designed, fabricated and tested, with tilting angle of 20 degrees at 100V In parallel we have developed and implemented a high-resolution Twyman-Green interferometer and a cryo-chamber for full surface and operation characterization. The micromirrors could be successfully actuated before, during and after cryogenic cooling. Surface deformation of gold coated mirrors at 300K and below 100K shows a slight increase from 35nm to 50nm PtV, still well suited for MOS application.
引用
收藏
页码：114 / +
页数：2
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