Large-scale hierarchical organization of nanowires for functional nanosystems

被引:50
|
作者
Whang, D
Jin, S
Lieber, CM [1 ]
机构
[1] Harvard Univ, Dept Chem & Chem Biol, Cambridge, MA 02138 USA
[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
关键词
assembly; Langmuir-Blodgett; building blocks; nanowires; nanolithography; hierarchical arrays; large-scale integration;
D O I
10.1143/JJAP.43.4465
中图分类号
O59 [应用物理学];
学科分类号
摘要
We review recent studies of solution-based hierarchical organization of nanowire building blocks. Nanowires have been aligned with controlled nanometer to micrometer scale separation using the Langmuir-Blodgett technique, transferred to planar substrates in a layer-by-layer process to form parallel and crossed nanowire structures over centimeter length scales, and then efficiently patterned into repeating arrays of controlled dimensions and pitch using photolithography. The hierarchically-organized nanowires open up key opportunities in several general areas of nanoscale science and technology. First, hierarchically-assembled nanowire arrays have been used as masks to define nanometer scale metal lines and surface features over large areas. Second, hierarchically-assembled nanowire arrays have been used to fabricate fully-scalable centimeter size arrays of field-effect transistors in high yields without requiring alignment of individual nanowires to output electrodes. Diverse applications of this approach for enabling a broad range of functional nanosystems, including macroelectronic and sensing applications, are described.
引用
收藏
页码:4465 / 4470
页数:6
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