Validity of the instrument transfer function for fringe projection metrology

被引：10
|
作者：
Zhang, Bin [1 ]
Davies, Angela [2 ]
Evans, Christopher [1 ]
Ziegert, John [1 ]
机构：
[1] Univ N Carolina, Dept Mech Engn, 9201 Univ City Blvd, Charlotte, NC 28223 USA
[2] Univ N Carolina, Dept Phys & Opt Sci, 9201 Univ City Blvd, Charlotte, NC 28223 USA
来源：
APPLIED OPTICS | 2018年 / 57卷 / 11期
关键词：
PHASE-SHIFTING PROFILOMETRY;
D O I：
10.1364/AO.57.002795
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
When fringe projection profilometry is used for measuring texture on rough surfaces, the measurement resolution is subject to the spatial frequency response of the instrument. The instrument transfer function (ITF) is a good metric to quantify this property. A valid ITF analysis requires the system to be linear. In this paper, we investigate the validity of using ITF to characterize the spatial resolution of a fringe projection system. Approximate linearity is shown through a mathematical analysis and simulation. We also demonstrate a practical method for measuring ITF using a stepped surface. The measured ITF is compared with an ITF prediction, which is simulated with a theoretical model. (C) 2018 Optical Society of America
引用
收藏
页码：2795 / 2803
页数：9
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