Focused ion beam fabrication of amorphous and polycrystalline Fe78B13Si9 alloys

被引：6
|
作者：
Hosokawa, H [1 ]
Shimojima, K [1 ]
Chino, Y [1 ]
Yamada, Y [1 ]
Wen, CE [1 ]
Mabuchi, M [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Inst Struct & Engn Mat, Moriyama Ku, Nagoya, Aichi 4638560, Japan
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 2002年 / 21卷 / 11期
关键词：
D O I：
10.1023/A:1015758225355
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The micro-scale amorphous and polycrystalline Fe78B13Si9 hexagon holes were machined by focused ion beam (FIB) to study the effect of microstructure on FIB fabrication in metallic materials. SEM micrographs of the samples were obtained. The results confirm that amorphous alloys are suitable for micro-, nano-fabrication by FIB fabrication because there are not factors responsible for rough surfaces.
引用
收藏
页码：837 / 839
页数：3
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