Optical and thermal characterization on micro-optical elements made by femtosecond laser writing

被引:0
|
作者
Buividas, R. [1 ,2 ]
Mizeikis, V. [3 ]
Kirsanske, G. [4 ]
Zukauskas, A. [4 ]
Malinauskas, M. [4 ]
Murayama, T.
Hikima, Y.
Morikawa, J.
Juodkazis, S. [1 ]
机构
[1] Swinburne Univ Technol, Ctr Microphoton, Fac Engn & Ind Sci, Hawthorn, Vic 3122, Australia
[2] Melbourne Ctr Nanofabricat, Australian Natl Fabricat Facil, Melbourne, Vic 3168, Australia
[3] Univ Shizuoka, Grad Sch Engn, Dept Elect & Mat Sci, Shizuoka 4228526, Japan
[4] Vilnius Univ, Ctr Laser Res, LT-10223 Vilnius, Lithuania
基金
澳大利亚研究理事会;
关键词
laser fabrication; photonic crystals; IR imaging; temperature diffusivity; IR senors; plasmonics; PHOTONIC CRYSTAL-STRUCTURES; FABRICATION; MICROFABRICATION; MICROSTRUCTURES; LITHOGRAPHY; ABSORPTION; REGIONS; DRIVEN; PULSES; SU-8;
D O I
10.1117/12.2033787
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Femtosecond laser polymerization of photonic crystals (PhCs) and diffractive micro-optical elements which can be easily integrated into complex 3D geometries of micro-fluidic chips is analysed in IR spectral domain. Thermal properties of such 3D optical elements and patterns were investigated by thermal imaging, IR spectroscopy and a heat-wave method using absorption-heating with visible light. Thermal imaging allows a simple in situ judgement on a 3D fabrication quality of photonic crystals and is simpler compared with scanning electron imaging. Photonic stop gaps at IR spectral range were clearly observed and IR mapping at the specific spectral wavelength reveals spatial uniformity of PhCs. Potential to use IR imaging with spectral IR plasmonic filters for sensor applications is discussed.
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页数:9
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