An automated wafer-handling system based on the integrated circuit equipments

被引：0
|
作者：
Cong Ming [1 ]
Zhou Yumin [1 ]
Jiang Ying [1 ]
Kang Renke [1 ]
Guo Dongming [1 ]
机构：
[1] Dalian Univ Technol, Sch Mech Engn, Minist Educ, Key Lab Precis & Non Tradit Machining Technol, Dalian 116024, Peoples R China
来源：
2005 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS | 2006年
关键词：
D O I：
暂无
中图分类号：
TP24 [机器人技术];
学科分类号：
080202 ; 1405 ;
摘要：
Based on the integrated circuit equipments, this paper respectively introduces the constitute and function of the automated wafer-handling system, the design and principle of the wafer-handling robot, wafer positioning system, and end-effector calibration system. This paper studies the up-down and rotation component, radial linear stretch component, end rotation component and the principle of work. The kinematics analysis of the linear mechanism of radial stretch component is presented.
引用
收藏
页码：240 / +
页数：2
相关论文
共 50 条
  • [1] Meeting the wafer-handling challenges of the brave new world of fully automated fabs
    Cameron, J
    [J]. MICRO, 1997, 15 (07): : 46 - &
  • [2] FPGA-BASED MOTION CONTROLLER FOR WAFER-HANDLING ROBOT
    Chou, Hsin-Hung
    Kung, Ying-Shieh
    Tsui, Tai-Wei
    Cheng, Stone
    [J]. TRANSACTIONS OF THE CANADIAN SOCIETY FOR MECHANICAL ENGINEERING, 2013, 37 (03) : 427 - 437
  • [3] Switchable adhesion for wafer-handling based on dielectric elastomer stack transducers
    Grotepass, T.
    Butz, J.
    Foerster-Zuegel, F.
    Schlaak, H. F.
    [J]. ELECTROACTIVE POLYMER ACTUATORS AND DEVICES (EAPAD) 2016, 2016, 9798
  • [4] Research on a novel R-θ wafer-handling robot
    Cong, Ming
    Yu, Xu
    Shen, Baohong
    Liu, Jing
    [J]. 2007 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION AND LOGISTICS, VOLS 1-6, 2007, : 597 - 602
  • [5] Effects of ergonomics-based wafer-handling training on reduction in musculoskeletal disorders among wafer handlers
    Wu, Hsin-Chieh
    Chen, Hsieh-Ching
    Chen, Toly
    [J]. INTERNATIONAL JOURNAL OF INDUSTRIAL ERGONOMICS, 2009, 39 (01) : 127 - 132
  • [6] Evaluating the 300 mm wafer-handling task in semiconductor industry
    Wang, MJJ
    Chung, HC
    Wu, HC
    [J]. INTERNATIONAL JOURNAL OF INDUSTRIAL ERGONOMICS, 2004, 34 (06) : 459 - 466
  • [7] Ergonomics interventions for wafer-handling task in semiconductor manufacturing industry
    Chung, HC
    Wang, MJ
    [J]. HUMAN FACTORS AND ERGONOMICS IN MANUFACTURING, 2002, 12 (03): : 297 - 305
  • [8] Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots
    Lee, Tae-Eog
    Lee, Hwan-Yong
    Lee, Sang-Jin
    [J]. INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, 2007, 45 (03) : 487 - 507
  • [9] Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing
    Han, Bing-Yuan
    Zhao, Bin
    Sun, Ruo-Huai
    [J]. SENSORS, 2023, 23 (20)
  • [10] Study on Dynamic Simulation Technology of Polar Coordinates Wafer-handling Robot
    Sha, Zhihua
    Zhang, Meizhen
    Zhang, Shengfang
    [J]. MATERIALS PROCESSING TECHNOLOGY, PTS 1-3, 2012, 418-420 : 2086 - 2089
12345