Plasma parameters of diffusion-controlled microwave discharges in surface-wave fields

被引:9
|
作者
Makasheva, K [1 ]
Shivarova, A [1 ]
机构
[1] Univ Sofia, Fac Phys, BG-1164 Sofia, Bulgaria
关键词
gas-discharge plasma diagnostics; radio-frequency diagnostics techniques; surface-wave-sustained discharges;
D O I
10.1109/TPS.2002.1003885
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Results from diagnostics of diffusion-controlled stationary gas discharges maintained in the field of propagating surface waves are presented in this study. The set of the plasma parameters obtained includes: 1) the plasma density (n) over bar, averaged over the discharge cross section, and its axial profile (n) over bar (z); 2) the electron-neutral elastic collision frequency v; 3) the parameter mu which describes the radial profile of the plasma density; 4) the parameter (D, the power absorbed on average by an electron, and its axial variation circle minus(z); 5) the electron temperature T-e(z); and 6) the gas temperature T-g. The mechanisms of electron heating and discharge self-consistency are discussed.
引用
收藏
页码:384 / 390
页数:7
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