Modeling and Fabrication Method of Micro Glass-Blown Shell Resonator

被引:0
|
作者
Xie, J. B. [1 ]
Chen, L. [1 ]
Zhou, J. Q. [1 ]
Xie, H. [1 ]
机构
[1] Northwestern Polytech Univ, Minist Educ, Key Lab Micro Nano Syst Aerosp, Xian, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
Glass spherical shell resonator; Glass blowing; Hemispherical resonator gyroscope; Micro-electromechanical system;
D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Hemispherical Resonator Gyroscope (HRG) is a new kind of high accuracy gyroscope that may has wide application in the future. The hemispherical shell is the key component of hemispherical resonator gyroscope, many researchers studied which but there're a few models have been established. This paper studies the modeling and fabrication method of micro glass-blown shell intended to be used in HRG. A manufacturing method was proposed in the first, then the researchers established models to evaluate the height and thickness of the glass-blown shell. Eventually the research team carried out the corresponding experiment and got experiment data. Through the contrast of simulated result and experimental data, the theoretical models used during simulation are reasonable but still need to improve in next work.
引用
收藏
页码:315 / 320
页数:6
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