High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor

被引：0
|
作者：
Hiromoto, Norihisa [1 ]
Banerjee, Amit [2 ]
Elamaran, Durgadevi [1 ]
Aoki, Makoto [3 ]
Apriono, Catur [4 ]
Satoh, Hiroaki [1 ]
Bruendermann, Erik [5 ]
Rahardjo, Eko Tjipto [4 ]
Inokawa, Hiroshi [1 ]
机构：
[1] Shizuoka Univ, Hamamatsu, Shizuoka 4328011, Japan
[2] Natl Univ Singapore, Lower Kent Ridge Rd, Singapore 119077, Singapore
[3] Natl Inst Informat & Commun Technol NICT, Tokyo 1848795, Japan
[4] Univ Indonesia, Depok 16424, Indonesia
[5] Karlsruhe Inst Technol KIT, D-76344 Karlsruhe, Germany
来源：
2019 44TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ) | 2019年
关键词：
D O I：
10.1109/irmmw-thz.2019.8874346
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In order to make room-temperature terahertz (ITU) detectors with high-detectivity, we have studied room-temperature THz antenna-coupled bolometers with titanium (Ti) meander-line thermistor fabricated on a high-resistivity silicon (Si) substrate by MEMS process. In this paper, we report the spectrum of responsivity which spreads at least in the range of 0.1 THz width around 1 THz. There are high-responsivity bands with the orders of 1000 V/W in the spectrum. Thanks to the meander-line and low noise of metal thermistors, we have achieved good noise-equivalent power (NEP) of the order of 10(-11) W/Hz(1/2) and response speed of 5 kHz for the room-temperature antenna-coupled bolometers with a Ti thermistor 0.1 mu m-wide and 90 mu m-long.
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