Fast One-Time Programming (OTP) and a Programming Verification Solution using Zener Diodes in a Standard CMOS Process

This article describes an effective, low-cost solution for sequential, one-time programming (OTP) and verification of zener diodes in an electronic micro-system. Using the proper structures of zener diodes (also known as 'zener zap') in a standard CMOS process, it is possible to achieve better accuracy in high-precision integrated circuits. For this purpose a solution has been developed for fast programming and programming verification of several zener zap structures on the ASIC (Application Specific Integrated Circuit). The entire zapping process for 250 zener zap structures is completed in the range of a few tens of milliseconds. This solution has been implemented for wafer sorting, and as well for packaged integrated circuits. It was successfully verified in the industrial production of more than ten million-high precision, electronic micro-systems with a remarkable overall yield of 97%.