DESIGN OF POWER-OPTIMIZED THERMAL CANTILEVERS FOR SCANNING PROBE TOPOGRAPHY SENSING

被引：15

作者：

Rothuizen, H. ^{[1
]}

Despont, M. ^{[1
]}

Drechsler, U. ^{[1
]}

Hagleitner, C. ^{[1
]}

Sebastian, A. ^{[1
]}

Wiesmann, D. ^{[1
]}

机构：

[1] IBM Res Corp, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

FORCE MICROSCOPE CANTILEVERS; DATA-STORAGE; EXPERIMENTAL IDENTIFICATION; HEATERS; DYNAMICS; SENSORS;

D O I：

10.1109/MEMSYS.2009.4805454

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on design optimization of cantilever-based thermal topography sensors using finite-element simulations, their fabrication and characterization. Measurements demonstrate vertical distance sensitivities Delta RIR of 2x10(-4) nm(-1) , yielding sub-angstrom resolution at bandwidths of several tens of kHz and at powers on the order of 1 mW.

引用

页码：603 / 606

页数：4

共 30 条

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