Formation of laser irradiation by non-uniform pumping discharge of KrF laser

Results of 2D simulation of a KrF laser are presented. In the model, inhomogeneities of distributions of the electric field and plasma particle concentration are considered. It is demonstrated, that the laser energy depends not only on the value of the total pump power, but also from its spatial distribution. The shape of the electrodes is a major determinant of the spatial distribution of pumping power in the active medium. For electrodes with small radii of curvature, the pumping power in the center of the discharge may be too high. This leads to the suppression of radiation in the center of the discharge and the limitation of the laser energy.