STUDY OF ADSORPTION PROPERTIES OF NANOSTRUCTURED FILMS BASED ON TIN DIOXIDE

被引：2
|
作者：
Sigaev, A. P. [1 ]
Averin, I. A. [1 ]
Karmanov, A. A. [1 ]
Pronin, I. A. [1 ]
Yakushova, N. D. [1 ]
机构：
[1] Penza State Univ, Dept Nano & Microelect, Penza, Russia
来源：
PHYSICAL AND CHEMICAL ASPECTS OF THE STUDY OF CLUSTERS NANOSTRUCTURES AND NANOMATERIALS | 2020年 / 12期
关键词：
sol-gel technology; films; mixed oxides; IR-Fourier spectroscopy; the adsorption centers; spectrophotometry; indicator method of a distribution of adsorption centers; plasma treatment; ZNO;
D O I：
10.26456/pcascnn/2020.12.162
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The results of theoretical and experimental studies of surface properties of nanostructured films based on tin dioxide using Fourier-transform infrared spectroscopy, ellipsometry and the indicator method of the distribution of adsorption centers are presented. Etching in inductively coupled plasma was used for additional post-processing of nanostructured films in order to activate the adsorption centers.
引用
收藏
页码：162 / 169
页数：8
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