Characterization of micromachined structures: comparison of measurement and theory

被引：0

作者：

Aceto, SC ^{[1
]}

Gutierrez, A ^{[1
]}

Simkulet, M ^{[1
]}

Krawcyck, T ^{[1
]}

Lienhard, M ^{[1
]}

Lundgren, A ^{[1
]}

Houghton, B ^{[1
]}

Patti, D ^{[1
]}

机构：

[1] InterSci Inc, Troy, NY 12180 USA

来源：

MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING II | 1999年 / 3875卷

关键词：

test station; micormachined structures; characterization; and time response;

D O I：

10.1117/12.360474

中图分类号：

TU [建筑科学];

学科分类号：

0813 ;

摘要：

Using the MEMSPEC-2000(TM) prototype test station, several micromachined structures have been characterized. The MEMSPEC-2000(TM) test station employs a laser based non-contact measurement technique to determine the three dimensional profile of the test structure. Vertical resolution of 0.1 micron and lateral resolution of approximately 1 micron can be achieved. The bandwidth of the sensor is DC to 100 kHz, allowing for time domain measurements of moving structures to be made. Standard static surface profiles have been measured for a number of varied types of test structures. The results of these measurements will be compared with design values. The time response of activated test structures will also be presented and compared to the theoretical predictions based upon modeling equations.

引用

页码：221 / 229

页数：9

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