Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

被引：66
|
作者：
Sugioka, K [1 ]
Masuda, M
Hongo, T
Cheng, Y
Shihoyama, K
Midorikawa, K
机构：
[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
[2] HOYA CANDEO OPTRON, Toda, Saitama 3350027, Japan
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 79卷 / 4-6期
关键词：
Microstructure; Acid Solution; Femtosecond Laser; Rapid Prototype; Hydrofluoric Acid;
D O I：
10.1007/s00339-004-2569-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40-50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique.
引用
收藏
页码：815 / 817
页数：3
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