Statistical shape analysis applied to microlithography

被引：0

作者：

Micheletti, Alessandra ^{[1
]}

Severgnini, Ermes ^{[2
]}

Terragni, Filippo ^{[1
]}

Vasconi, Mauro ^{[2
]}

机构：

[1] Univ Milan, Dipartimento Matemat, Via C Saldini,50, I-20133 Milan, Italy

[2] STMicroelect Srl, I-20041 Agrate Brianza, Italy

来源：

DATA ANALYSIS AND MODELING FOR PROCESS CONTROL III | 2006年 / 6155卷

关键词：

shape descriptor; size function; statistical shape analysis;

D O I：

10.1117/12.653037

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper we introduce recent mathematical tools for shape description called size functions. Some features of these descriptors such as robustness with respect to noise are pointed out. A first attempt to join the theory of size functions with randomness and to develop the related statistical analysis is then presented. The resulting procedure is applied to some specific problems which arise in microlithography of electronic devices.

引用

页数：8

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